vacuum furnace
Dry, air-cooled multi-stage Roots pumps in the range can be directly used
to replace oil-lubricated rotary vane vacuum pumps in the range of available
pumping speeds because of their involvement and performance parameters.
The
advantages of multistage Roots pumps include:
There is no lubricant in the
gas displacement area.
Medium pumped with oil or ion is free from any
pollution.
No working fluid treatment problem
Constant vacuum parameters
with long-term stability
High Reliability Due to Minimum Number of Fragile
Parts
When each power supply is connected to the main power supply frequency
and general power supply, it has a constant working parameter of one-phase or
three-phase converter.
Air cooling, no installation cost and water cooling
operation cost
Continuous operation for high inlet pressure
Long
maintenance intervals lead to low operating costs
Selection of Remote Control
Using Frequency Converter
Ideally used for this application due to adjustable
rpm, reduced noise level, energy utilization and power input
Minimum leakage
rate
Ideal front stage pump for turbomolecular pump and Roots
pump
Certification meets UL/CSA and SEMI S2 requirements
steam
If there
is no additional measures, because of its relatively low working temperature,
the use of oil-free pumps will have the risk of condensation in the pump.
Similar to rotary vane vacuum pumps, multi-stage Roots pumps are equipped with
air ballasts to increase steam tolerance and steam capacity of pumps. The
formation of condensate in the pump increases the limit pressure, which leads to
corrosion, and in the worst case, will lead to pump failure.
In the case of
no gas town, the pump can transport medium with moisture content up to 5%. Using
the standard pump gas town, the steam tolerance is 10 hPa and the steam capacity
is 100 g. H - 1. In the special pump version (CV, condensable steam), gas
throughput can be increased to achieve steam tolerance of about 100 hPa and
steam capacity of 700 to 1,000 G H - 1, depending on the ambient
temperature.
As for rotary vane vacuum pumps: before evacuating steam, the
pump body must be preheated by air ballast for at least half an hour. High
temperature pump body reduces condensation. Other ways to reduce condensation
include obtaining the lowest possible outlet pressure and discharging condensate
separately. Vertical exhaust pipes must be used to prevent back pressure at the
exit. If there is an extraction system, the export should be connected to
it.
Dust and Particles
If there is no control over the entry of large
particles, in the worst case, the multi-stage Roots pump can be blocked and
completely failed. Therefore, in dust-containing process or glass manufacturing,
filter is installed at the intake side to prevent damage.
Corrosive
gas
Pumps are not suitable for pumping large quantities of corrosive gases.
In this respect, multistage Roots pumps can be used in corrosive gas processes
in the semiconductor, solar and paint industries (see Section 4.6). However, the
pump can be used to treat at least a small amount of corrosive gas. In this
case, the version with inert gas purification is used, in which the bearing is
protected by inert gas curtain, and the process gas is diluted by introducing
inert gas into a pump stage.
Its high air tightness guarantees the long-term
use of multistage Roots pumps and the best solution for the use of expensive
gases (4He, 3He, isotope labeled gases) in the gas circuit.
Light Gas and
High Vacuum
Multistage Roots pumps have outlet valves to prevent moisture and
oxygen from diffusing back into the suction chamber, which can lead to chemical
reactions in the pump in the application of corrosive gases. If vacuum is needed
to prevent light gas accumulation and reflux diffusion, the valve must be opened
regularly (e.g. through the gas town) in application.
Even if the use of
micro vacuum or gas towers at the exhaust is sufficient to replace even
continuous helium gas throughput, such as in cryostat of evaporator, the
performance data are almost the same as that of nitrogen or air.
Roots Blowers Price
Rotary Vane Vacuum Pump Structure
Roots Vacuum Pump Supplier
Rotary Vane Vacuum Pump Supplier
Email: con...@evpvacuum.com