DIBL tips? how to measure metallurgical channel length

[paul friedberg]

1. Stuck on DIBL, have about 140mV of DIBL... but my junction depths are as
short as possible, I think... implant w/ 5keV everywhere, Xj_ext = 7.5nm,
Xj_deeps/d = 21.4nm. Also, t_ox is just about at the limit, so I think I've
made that characteristic length as small as possible (in the exp(L/l) term).
Any other tips, or is this quasi-OK to miss the spec slightly?

2. To measure the metallurgical channel length, do we measure from the
doping=0 points as the end of the LDD right along the surface of the
channel?

thnks,
Paul

[Vivek Subramanian]

1) 140mV isn't too bad... provided your design is "elegant"
2) Yes.

--
-----------------------------------------------------
Vivek Subramanian
Assistant Professor, EECS
University of California, Berkeley
571 Cory Hall #1770
Berkeley, CA 94720
Ph: (510) 643-4535
Fax: (510) 642-2739
"paul friedberg" <pfri...@eecs.berkeley.edu> wrote in message
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