Ge-evaporation

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Petra Reinke

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Oct 21, 2011, 3:55:46 AM10/21/11
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Dear All,
we want to evaporate Ge from an Omicron EFM 3 electron beam evaporator with a W-crucible. Unfortunately we do not have a QCM on this chamber and are for geometric reasons unable to mount one for the measurement of rates. Have any of you the power-deposition rate relation for Ge evaporations? Or a few hints as to the evaporation conditions for at least a few rates? 
kind regards, Petra

Al Slavin

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Oct 21, 2011, 10:40:34 AM10/21/11
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Petra,

When I start to evaporate a new material, I find it useful to look up the vapour pressure tables to give me an idea of the temperature I need for a reasonable evaporation time. Kurt Lesker provides a very useful table for purpose. Ge is at http://www.lesker.com/newweb/deposition_materials/MaterialDeposition2.cfm?pgid=0

Alan Slavin


>>> Petra Reinke <petra....@gmail.com> 21/10/2011 3:55 am >>>

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