http://www.ami.ac.uk/courses/ami4202_mdesign/u02/index.asp
http://www.ami.ac.uk/courses/ami4202_mdesign/u03/index.asp
http://www.ami.ac.uk/courses/ami4202_mdesign/u01/index.asp
For the photo-lithography section, you can have a look at the wikipedia. It is written in a simple way but there are several misinterpretations. Therefore, follow the Sze's book. However, you will find a very simple schematic diagram of the stepper projection system (search "stepper").
Hope all of you will work hard and perform well in the exams.
If you need any help or have any doubt, meet me in office.
Beat wishes
SB