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Selective etch of SiO2 over SiCr

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erji...@gmail.com

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Aug 6, 2008, 5:59:52 PM8/6/08
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Hi,

Does anyone know of a good selective etch (either dry or wet) that
etches SiO2 (or SiNx) but stops on SiCr (or other thin film resistor
materials such as WSi2)? Will BOE work?

thanks
Erji

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