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Cr film sputtering
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lsudh...@googlemail.com
Jul 31, 2008, 11:54:20 AM7/31/08
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Hi,
I am having issues with magnetron sputtering of Cr. The chamber and
the film seems to have coloration after depositing the film at 3 mTorr
and a DC power of 50-100 W. Since the Cr film should look like a nomal
metal (no color), I am looking to find solution to this issue. Also,
can anybody help me in understanding the drift in the manometer
pressure reading when the plasma is turned on for deposition?
I would appreciate any input.
thanks.
I am having issues with magnetron sputtering of Cr. The chamber and
the film seems to have coloration after depositing the film at 3 mTorr
and a DC power of 50-100 W. Since the Cr film should look like a nomal
metal (no color), I am looking to find solution to this issue. Also,
can anybody help me in understanding the drift in the manometer
pressure reading when the plasma is turned on for deposition?
I would appreciate any input.
thanks.
WWT-USA Technology
Sep 16, 2008, 7:30:59 PM9/16/08
to
Both symptoms point to air leak in the chamber, causing oxidation of the
newly deposited film and drifting of the pressure. Try leak checking the
chamber prior to turning the power on first, and then with the power on to
verify its integrity. An RGA would be useful because it will tell you
what's going on in there real time. I'd also increase the vacuum some to
improve the film quality. Hope this helps.
newly deposited film and drifting of the pressure. Try leak checking the
chamber prior to turning the power on first, and then with the power on to
verify its integrity. An RGA would be useful because it will tell you
what's going on in there real time. I'd also increase the vacuum some to
improve the film quality. Hope this helps.
Anco Blazev
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