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EUV

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John Larkin

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Feb 3, 2012, 10:56:21 PM2/3/12
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http://www.laserfocusworld.com/articles/2011/11/euv-lithography.html


--

John Larkin, President Highland Technology Inc
www.highlandtechnology.com jlarkin at highlandtechnology dot com

Precision electronic instrumentation
Picosecond-resolution Digital Delay and Pulse generators
Custom timing and laser controllers
Photonics and fiberoptic TTL data links
VME analog, thermocouple, LVDT, synchro, tachometer
Multichannel arbitrary waveform generators

Tim Williams

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Feb 4, 2012, 1:31:29 AM2/4/12
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"Wall-plug power for the HVM I, with a 30 kW laser and a 105 W EUV output,
is estimated to be around 500 kW"

Sheeeeit.

And I thought we were concerned about humping a coil along merely without
the tuning capacitor (think >100kW and Q ~ 10). We don't even have to worry
about tin plasma, except when some connections come loose.

Tim

--
Deep Friar: a very philosophical monk.
Website: http://webpages.charter.net/dawill/tmoranwms

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