On Thursday, August 11, 2016 at 12:56:48 AM UTC+10, Phil Hobbs wrote:
> On 08/10/2016 10:34 AM, Jim Thompson wrote:
> > On Wed, 10 Aug 2016 07:20:45 -0700 (PDT), Phil Hobbs
> > <
pcdh...@gmail.com> wrote:
> >
> >>> Most CMOS is ion implanted IIRC, so not exactly exotic.
> >>
> >> They don't do litho with crayons anymore, either. ;)
> >>
> >> Cheers
> >>
> >> Phil Hobbs
> >
> > That had its advantages ;-)
> >
> > My Master's project had a JFET. I just drew what I wanted on a
> > quadrille pad and they (Motorola's layout guys) cut the Rubylith to
> > match... those were the good-ol-days... no grand
> > authorization-by-committee required to conduct an experiment... parts
> > out in three days ;-)
> >
> > ...Jim Thompson
> >
>
> I used to do a lot of my own processing too, back in my silicon
> photonics days, but it was with a Leica e-beam writer with 30 nm minimum
> feature size.
Precisely when? I worked on the Cambridge Instruments EBMF 10.5, which did offer than kind of resolution. That had been incrementally developed over about a decade. Sometime around 1990, Philips gave up on their electron-beam microfabricator - which was a good machine, but needed more supported than they were set up to give - and sold it to Cambridge Instruments-Leica, who were happy to get a machine with fewer obsolete part problems and a non-wire-wrapped back-plane.