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Al and Cu etching
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Joseph Zhong-You Shi
Feb 3, 1998, 3:00:00 AM2/3/98
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I'd like to find an etchant or a formulation to etch Cu and Al
simultaneously. Ideally the etching rate of Al should be much slower
than that of Cu. Also we do not want anything to do with Cr for
environmental reasons. Or if you have a magic Al inhibitor to slow its
etching rate down so that I can use Fe(3+) for both.
Any suggestion and direction are greatly appreciated!
Joe Shi
Ford Motor Company
Email: js...@ford.com
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