Dear all,
Following are the minutes of the meeting.
1) Sound from rotator of the PLD II
2) Sound from rotary pump and vacuum delay in PLD I
3) Gas flow issue with MFC & its controller of PLD 3
4) Spare quartz windows are required for each PLD chamber. (4 nos)
5) Cleaning quartz window & fixing quartz window must be added to SOP.
6) Heater Top surface cleaning must be done by last user.
7) Laser refilling should be done during Office hours & Weekdays.
8) All users need to be trained for Laser refilling.
9) Weekend laser refilling with prior permission is allowed.
10) Record KrF/ He Pressure after refilling
11) Dedicated N2 cylinder is required for lasers
12) Flow meter and Valves need to be connected to both Laser for N2.
13) Notice for switch ON/ OFF N2 at laser side.
14) Users need to keep the working place clean, Punishment will be given to those user who are not following the practice.
15) PLD -4 need to made UP urgently
16) Maximum five days slot booking can be done by user.
17) KrF Gas Leak Detector required.
18 ) Gas cabinet for KrF cylinder.
19) XXL size clean room gown for 1.1 Lab
20) Notice for closing Fume hood after use.
21) Extra Petri dishes required.
22) Exhaust pipe length must be increase for Old PLD Laser.
Thanks & Regards,
Manisha