Tutorial on EUV/SXR Light Sources and Lasers

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Anand Asundi

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Aug 16, 2011, 8:10:21 PM8/16/11

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Date: Thursday 25 August 2011

Time 1:00 pm - 5:30 PM

Location - Fusion@MAE Seminar Room (Block N3.1-B3c-06) (MAP)

EUV sources and lasers are an essential component of the drive to achieve small structures as well as measure sub-50 nm devices and components. There are two schools of thoughts in the development of these sources - one uses Higher Harmonic Generation (HHG) and the other uses Plasma Focus Device for generating EUV light amongst others. In this tutorial two experts in the field - Dr Andrius Baltuska, Photonics Institute, Vienna University of Technology and Dr Rajdeep Rawat from NIE, Singapore will provide us with a short tutorial on these technologies and developments.