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Nano-Fab

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This is the discussion group for Prof. Andrew Sarangan's research group at the University of Dayton, Ohio, USA

http://www.nano-fab.com

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Jianhao Shen, Andrew Sarangan4

11/4/25

Sputter tool Gas#1 Power button issue

Hi professor, I tried to vent the chamber but it couldn't work. I left my sample and the Al2O3

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Sputter tool Gas#1 Power button issue

Hi professor, I tried to vent the chamber but it couldn't work. I left my sample and the Al2O3

11/4/25

9/6/25

Samples left under hood

Hi everyone, I occasionally disposed the liquid in the dish under hood. I'm sorry about that. I

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Samples left under hood

Hi everyone, I occasionally disposed the liquid in the dish under hood. I'm sorry about that. I

9/6/25

7/4/25

Waste chemical in utility room

Hi everyone, There is a SU8 developer waste in the utility room. The bottle is not full and has only

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Waste chemical in utility room

Hi everyone, There is a SU8 developer waste in the utility room. The bottle is not full and has only

7/4/25

6/19/25

Nitrogen tank running out

Hi professor, The Nitrogen tank has less than half left. Last time the direct write litho tool

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Nitrogen tank running out

Hi professor, The Nitrogen tank has less than half left. Last time the direct write litho tool

6/19/25

6/6/25

Updates of cleanroom

Hi professor, The computer of the sputter deposition went like the attached picture during my

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Updates of cleanroom

Hi professor, The computer of the sputter deposition went like the attached picture during my

6/6/25

Andrew Sarangan

5/29/25

Chilled water and DI was left on

I found these were left on, and the water to the sputter tool was also running. There were no

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Chilled water and DI was left on

I found these were left on, and the water to the sputter tool was also running. There were no

5/29/25

5/26/25

Nitrogen tank running out

Hi professor, The nitrogen tank is lower than half. Could you place an order for a new one? Thank you

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Nitrogen tank running out

Hi professor, The nitrogen tank is lower than half. Could you place an order for a new one? Thank you

5/26/25

Andrew Sarangan, Jianhao Shen2

5/21/25

Hi everyone, I just submitted the disposal form. I attached the template form and the submitted one

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Hi everyone, I just submitted the disposal form. I attached the template form and the submitted one

5/21/25

Andrew Sarangan, Osama Ahmed Rana2

5/20/25

Vent valve on sputter dep

Hello Professor, I have tested the leak at a base pressure of 4.4uT, there is no nitrogen leak. Thank

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Vent valve on sputter dep

Hello Professor, I have tested the leak at a base pressure of 4.4uT, there is no nitrogen leak. Thank

5/20/25

5/11/25

Sputter chamber down

Hi everyone, The sputter chamber cannot be vacuumed until the new pneumatic valve arrives. Please do

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Sputter chamber down

Hi everyone, The sputter chamber cannot be vacuumed until the new pneumatic valve arrives. Please do

5/11/25

Jianhao Shen, Andrew Sarangan2

5/6/25

Cockroach inside the class 100 room

That tube was the drain tube from the spray developer (which I took out for repairs). Can you pour

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Cockroach inside the class 100 room

That tube was the drain tube from the spray developer (which I took out for repairs). Can you pour

5/6/25

Andrew Sarangan, … Jianhao Shen6

4/30/25

Nanofab Lab group meeting tomorrow (Friday 25th)

Hi group, Sorry for the delay. Please find the clean-up schedule 2025 attached. Thank you. Best

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Nanofab Lab group meeting tomorrow (Friday 25th)

Hi group, Sorry for the delay. Please find the clean-up schedule 2025 attached. Thank you. Best

4/30/25

Andrew Sarangan

4/29/25

Profiler stage fixed

I fixed the profiler stage this weekend. This is likely to happen again due to the design. The

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Profiler stage fixed

I fixed the profiler stage this weekend. This is likely to happen again due to the design. The

4/29/25

5/28/24

Cleanroom cleaning schedule

Hi everyone, Please check the attached schedule for summer. Remember to upload the cleanup form each

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Cleanroom cleaning schedule

Hi everyone, Please check the attached schedule for summer. Remember to upload the cleanup form each

5/28/24

Andrew Sarangan

3/7/24

Particle Counter and more cleanroom videos

The particle counter has been fixed, so please use it during the weekly cleanup. We made a few more

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Particle Counter and more cleanroom videos

The particle counter has been fixed, so please use it during the weekly cleanup. We made a few more

3/7/24

Andrew Sarangan

12/7/23

Cleanup schedule - Reminder

First Friday of the month: Osama & Samuel Second Friday of the month: Maryam & Leila Third

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Cleanup schedule - Reminder

First Friday of the month: Osama & Samuel Second Friday of the month: Maryam & Leila Third

12/7/23

Andrew Sarangan

11/15/23

Sputter chamber ok now

The issue was partly due to deposition entering the rotary feedthru through the exposed part of the

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Sputter chamber ok now

The issue was partly due to deposition entering the rotary feedthru through the exposed part of the

11/15/23

Andrew Sarangan

11/15/23

Sputter chamber leak

The leak is in the rotary feed thru. Could be the double edged oring I put in instead of the regular

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Sputter chamber leak

The leak is in the rotary feed thru. Could be the double edged oring I put in instead of the regular

11/15/23

Andrew Sarangan

11/15/23

Filmetrics tool

Could you please make sure the Filmetrics tool is turned off when you leave, especially the lamp? I

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Filmetrics tool

Could you please make sure the Filmetrics tool is turned off when you leave, especially the lamp? I

11/15/23

Andrew Sarangan

11/10/23

Cleanup schedule

Cleanup Schedule November 3rd Osama Samuel November 10th Maryam Leila November 17th Rosy Jianhao

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Cleanup schedule

Cleanup Schedule November 3rd Osama Samuel November 10th Maryam Leila November 17th Rosy Jianhao

11/10/23

Andrew Sarangan

11/8/23

Sputter changer rotation coupler issue

https://youtu.be/Pgs83rIge50

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Sputter changer rotation coupler issue

https://youtu.be/Pgs83rIge50

11/8/23

Andrew Sarangan

10/31/23

Shuttleline ICP/RIE etch tool video

https://youtu.be/IlkQBgdEG1c

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Shuttleline ICP/RIE etch tool video

https://youtu.be/IlkQBgdEG1c

10/31/23

Andrew Sarangan

10/28/23

Rotary feedthru repair video

https://youtu.be/bRrQb8jLzK8

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Rotary feedthru repair video

https://youtu.be/bRrQb8jLzK8

10/28/23

Andrew Sarangan

10/6/23

The sputter chamber vent was left on, so the N2 has been flowing for a while and iced up the LN2 tank

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The sputter chamber vent was left on, so the N2 has been flowing for a while and iced up the LN2 tank

10/6/23

Andrew Sarangan

10/5/23

Clean up schedule for October

The schedule is as follows for October: Cleanup Schedule October 6th Osama Samuel October 13th Maryam

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Clean up schedule for October

The schedule is as follows for October: Cleanup Schedule October 6th Osama Samuel October 13th Maryam

10/5/23

Roseanna Lawandi

10/4/23

Developer Waste vs. Solvent Waste

Dear all, From now on, we will dispose of developers in a separate waste bottle than solvents. So,

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Developer Waste vs. Solvent Waste

Dear all, From now on, we will dispose of developers in a separate waste bottle than solvents. So,

10/4/23

Andrew Sarangan2

10/2/23

Cleanup schedule

https://youtu.be/lLQholZeVMU On Thu, Sep 28, 2023 at 9:23 PM Andrew Sarangan <asar...@gmail.com

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Cleanup schedule

https://youtu.be/lLQholZeVMU On Thu, Sep 28, 2023 at 9:23 PM Andrew Sarangan <asar...@gmail.com

10/2/23

Andrew Sarangan2

9/25/23

Weekly cleanup guidance

Forgot to mention that this document was put together by Rosy & Jianhao with contribution from

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Weekly cleanup guidance

Forgot to mention that this document was put together by Rosy & Jianhao with contribution from

9/25/23

Andrew Sarangan

9/20/23

Do not touch anything near the evap area

We are working on rebuilding the ebeam gun. There are small parts everywhere, so please do not touch

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Do not touch anything near the evap area

We are working on rebuilding the ebeam gun. There are small parts everywhere, so please do not touch

9/20/23

heenk...@udayton.edu

9/15/23

Friday Lab cleanup

Hi All, Me and Asela completed the Lab cleanup based on the checklist as we discussed in our last

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Friday Lab cleanup

Hi All, Me and Asela completed the Lab cleanup based on the checklist as we discussed in our last

9/15/23

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