T Bechtold, D Hohlfeld, E B Rudnyi, M Gᅵnther
Efficient extraction of thin film thermal parameters from
numerical models via parametric model order reduction
J. Micromech. Microeng. 20 (2010) 045030
The paper is available at
http://stacks.iop.org/0960-1317/20/045030
and it is in free access for the next few weeks (well, it is still
necessary to register to download it).
If you like the idea, the code in Mathematica that will help you to
implement something like this is available at
http://modelreduction.com/ModelReduction/Parametric.html
see Tutorial in Mathematica.
Evgenii