Dopant 2 MFC resizing to 100 sccm maximum flow
0 views
Skip to first unread message
EE
Oct 20, 2007, 8:43:14 PM10/20/07
to EPI2
Many users have requested that Dopant 2 MFC be resized from 500 sccm
to 100 sccm maximum flow. Maintenance is planing to do this in
January '08 unless somebody has any objections.
to 100 sccm maximum flow. Maintenance is planing to do this in
January '08 unless somebody has any objections.
elm...@stanford.edu
Oct 20, 2007, 8:54:54 PM10/20/07
to EPI2
Resizing the MFC will take about 2 weeks. I week to recalibrate the
MFC and about 1 week to requalify the process.
MFC and about 1 week to requalify the process.
Reply all
Reply to author
Forward
0 new messages