Problem: Pressure setpoint deviation fault
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EE
Nov 7, 2007, 12:50:06 PM11/7/07
to EPI2
The fault seems to be caused by slow throttle valve throttle valve
response. I think we need to optimize the pressure control PID
parameters. We will try to do this when Maurice returns.
response. I think we need to optimize the pressure control PID
parameters. We will try to do this when Maurice returns.
EE
Nov 9, 2007, 11:39:42 AM11/9/07
to EPI2
Observed that system had a problem when going from a recipe step to
another step with the same pressure but different total volume of
gas. Asked a user to modify his recipe so that the total of gas was
kept constant. He accomplished this by reducing H2 flow. Pressure
control was much better.
another step with the same pressure but different total volume of
gas. Asked a user to modify his recipe so that the total of gas was
kept constant. He accomplished this by reducing H2 flow. Pressure
control was much better.
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