Yes, the 9950 and all 9000s were ECL with the 2900 family of bit-slice chips.
There were 6 boards in the CPU: Execute Units E1 & E2, Instruction I-Unit, S-Unit (Cache), CS (Control Store), and MC (Memory Controller).
The 6000 series was ECL with custom Prime-designed Motorola MCA 2500 ECL VLSI.
There were 6 boards in the CPU: the Execution Unit, Instruction/Cache Unit, Control Store, and Memory Controller with multiple VLSI designs on each of the 4 boards that made up the CPU.
The next ECL CPU (The Lion project) was to be with the MCA 25000 VLSI, but that project was canceled after the takeover attempt and the buyout by JH Whitney and DR Holdings.
The 5000 series was with custom Prime-designed CMOS from LSI Logic. The single processor variations had multiple chips for the complete CPU on one board plus slots for memory modules on the same board. The 5370 dual processor version had two sets of CPU chips and a new Memory Controller all on one board with a second board for all the memory modules. Those projects survived the takeover and the 5370 dual CPU was the last machine designed and shipped from Prime.