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Cleanroom HVAC
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WBJ
May 27, 1998, 3:00:00 AM5/27/98
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Hi,
There are many technics to form clean environment(static air flow,
static pressure difference, etc)
What types of controlling HVAC of cleanroom?
There are many factors which can take effects on HVAC of cleanroom
like temperature, humidity, pressure, flow of wind, etc.
Small change of that factors can hazard quality of products like thin
film masking for semiconductors.
Where could I find cleanroom technologies in internet?
Regards,
BJ Woo.
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