Ben Streetman Solid State Electronic Devices
Rosicler Kleckner
THE most widely used introduction to solid state electronic devices text, this book is designed to help students gain a basic understanding of semiconductor devices and the physical operating principles behind them. This two-fold approach 1) provides students with a sound understanding of existing devices, so that their studies of electronic circuits and systems will be meaningful, and 2) helps them develop the basic tools with which they can later learn about applications and the latest devices. The text provides one of the most comprehensive treatments of all the important semiconductor devices, and reflects the most current trends in the technology and theoretical understanding of the devices.
In this introductory MEMS class, we cover the fundamental basis of microsystems technology. Microelectromechanical devices (MEMS), such as actuators, pressure sensors, and opto-mechanical assemblies, require knowledge of a broad range of disciplines, from microfabrication and mechanics to chemistry and solid state device physics. These topics are covered in this demanding course, which includes a mandatory laboratory component.
Students (both undergraduate and graduate) can register for either 489F or 808K, as they wish. Students registered for 808K will do additional assignments and homework problems and have extra problems on quizzes and exams.
This course is the introductory MEMS offering at the University of Maryland. It will prepare you for more advanced study (courses such as ENME 602, MEMS Device Physics and Design; ENME 808U, Microfluidics and BioMEMS, and ENEE719R Advanced Topics in Microelectronics: Design and Fabrication of Micro-Electro-Mechanical Systems, or graduate study in MEMS).
Lectures will cover semiconductor device physics, microfabrication techniques, fabrication sequences, and mask design. The major components of the first semester of this course will include the topics listed below.
We will mix device physics and MEMS in the lectures. Semiconductor device physics is covered because mechanical engineers do not have the necessary background to study MEMS, which arose from Si chip technology, and it cannot be understood properly without this knowledge. Everything written in this field presumes that the reader has this background.
The lab will give you the opportunity to get hands-on experience with basic processing steps. The class has several 3-hour slots a week. You will thus have one lab period every three weeks in groups of no more than six, with 4 labs total during the semester. Because of the constraint on the lab time, class enrollment is limited. Lab times will be scheduled around the schedules of the students in the class, so that everyone is able to attend. You are responsible for showing up at your lab slot on time.
Students are expected to have done the assigned reading for each lecture and should be prepared to discuss it in class. A quiz will be given on every reading assignment during the first few minutes of class.
Homework assignments and problem solutions will be posted online. Students should view homeworks as learning experiences. Each student should hand in his/her own version of the homework, and this should not be copied from another student; you should work through the problems on your own. Homework problems that are seriously attempted will be given full credit.
Il corso fornisce la capacit di applicare la teoria dei semiconduttori per analizzare il funzionamento dei principali dispositivi elettronici per rendere lo studente in grado di valutare le prestazioni di dispostivi e sensori e di progettare ed analizzare circuiti.
The course allows students to acquire in-depth knowledge of the operation of solid state devices to apply it to the design of electronic circuits using integrated circuit design techniques. It will provide the necessary knowledge for solving problems related to the application of devices and sensors in various scenarios.
The course provides the ability to apply semiconductor theory to analyze the operation of the main electronic devices to enable the student to evaluate the performance of devices and sensors and to design and analyze circuits.
The course includes multidisciplinary contents, since, starting from the basic knowledge of physics and nanotechnology, enables the analysis of electronic devices and the extraction of both analytical and circuit model to be used in the design of electronic circuits and sensors.
Fondamenti di fisica dei semiconduttori ed elementi di meccanica quantistica. Propriet elettroniche e strutturali di materiali su scala nanometrica: densit di stati, struttura a bande, curve di dispersione, bandgap, spettri di trasmissione e curve I-V.
Modelli di trasporto di carica ohmico-diffusivo e balistico, giunzioni p-n e metallo-semiconduttore, interconnettori ed effetti termici correlati, comportamento statico e dinamico di transistori bipolari e transistori MOS. Elementi sui transistori ad etero-giunzione. Correlazione fra parametri geometrici/fisici/tecnologici e le prestazioni dei dispositivi elettronici.
Introduzione ai metodi di fabbricazione e caratterizzazione dei dispositivi elettronici su scala nanometrica: crescita/deposizione, litografia, attacchi chimici e al plasma.
Dispositivi elettronici di nuova generazione.
Dispositivi e tecniche di progettazione.
Fundamentals of semiconductor physics and elements of quantum mechanics. Electronic and structural properties of nanoscale materials: density of states, band structure, dispersion curves, bandgap, transmission spectra and I-V curves.
Ohmic-diffusive and ballistic charge transport models, p-n and metal-semiconductor junctions, interconnectors and correlated thermal effects, static and dynamic behavior of bipolar transistors and MOS transistors. Elements on hetero-junction transistors. Correlation between geometric / physical / technological parameters and the performance of electronic devices.
Introduction to the methods of fabrication and characterization of nanoscale electronic devices: growth / deposition, lithography, chemical and plasma attack.
New generation electronic devices for the IoT.
Design devices and techniques.
Il livello di apprendimento viene valutato attraverso una prova orale sul programma del corso. In aggiunta e integrazione alla prova orale, il docente, durante le lezioni, potr proporre alcune attivit e piccoli progetti da svolgere in proprio o in piccoli gruppi.
Per ottenere valutazione positiva, si deve dimostrare di aver ben compreso i concetti esposti durante il corso. In particolare verr verificata la capacit di descrivere i meccanismi fisici e i dispositivi introdotti nel corso, e la capacit di ricavare, argomentare, dimostrare e collegare relazioni e teorie legate ai dispositivi elettronici e alle loro applicazioni.
Perch l'esito complessivo della valutazione sia positivo, le studentesse e gli studenti devono conseguire almeno 18
punti (su 30). La lode potr essere attribuita alle studentesse e agli studenti che raggiungano il voto massimo di 30/30 e dimostrino di essere in grado di applicare autonomamente conoscenze e competenze acquisite, anche a contesti diversi da quelli proposti a lezione. A tal fine si terr conto della qualit dell'esposizione (utilizzo linguaggio appropriato), della capacit di correlare tra loro sia i diversi argomenti del corso, sia questi con altre discipline, della complessiva autonomia di giudizio dimostrata.
Students' learning level is assessed through an oral test on the course program. In addition and integration to the oral test, the teacher, during the lessons, will be able to propose some activities and small projects to be carried out on his own or in small groups.
To obtain a positive evaluation, the student should demonstrate that he has understood the concepts exposed during the course. In particular, the ability to describe the physical mechanisms and devices introduced in the course, and the ability to derive, argue, demonstrate and connect relationships and theories related to electronic devices and their applications will be tested.
In order for the overall evaluation to be positive, the student must achieve at least 18
points (out of 30). The honors can be attributed to students who reach a maximum score of 30/30 and demonstrate that they are able to independently apply the knowledge and skills acquired, even to contexts other than those proposed in class. To this end, account will be taken of the quality of the exhibition (use of appropriate language), of the ability to correlate both the different topics of the course and these with other disciplines, of the overall autonomy of thinking demonstrated.