Sputter tool Gas#1 Power button issue

[Jianhao Shen]

Hi professor,

I was running a deposition with Al2O3 target on RF Cathode1 this morning. The deposition started well but the Gas#1 Power button suddenly went off during the deposition. The pressure remained at ~0.225T even though I turned the gas bleed valve to the lowest. Now the Gas#1 Power button cannot be turned on. The pressure inside the chamber can still ignite the plasma but can only deposit at the fixed pressure of 0.225T. What should I do to fix the issue? Thank you. 

Best regards,
Jianhao Shen

[Andrew Sarangan]

200mT is close to the cross over pressure of the dual range pressure sensor. Just reset the pressure sensor and try it if it fixes it.

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[Jianhao Shen]

Hi professor,

I tried to reset the pressure sensor by disconnecting the VGA cable and connecting again, but the problem was not resolved. I also noticed that in the Pump&Valves menu both the TC1 and Turbo@Speed went off. I think the problem might come from the pump. I tried to turn off the turbo pump and backing valve, then restarted the mechanical pump and backing valve. The pressure didn't went down. It's still at 0.23T level. Should I vent the chamber? I'm worried that once the chamber is vented it won't be pumped. Thank you.

Best regards,
Jianhao Shen

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[Jianhao Shen]

Hi professor,

I tried to vent the chamber but it couldn't work. I left my sample and the Al2O3 target inside. Please let me know when you come to check it. I will also be around. Thank you. 

Best regards,
Jianhao Shen