on wafer measurements using VNA tools

[Stella Bevilacqua]

Hi,

I am working with THz on wafer measurements, I was wondering if VNA tools can be used for on wafer measurements and hence for the estimation of the uncertanity in the calibraiton.

thanks for your answer

Stella

[Juerg Ruefenacht]

Hi Stella,

 

The on wafer support of VNA Tools was developed in the frame work of the EMPIR project 14IND02 'Microwave measurements for planar circuits’

http://www.planarcal.ptb.de/planarcal/14ind02-home.html

 

VNA Tools supports on wafer specific measurements and calibrations methods but not to control the wafer probe station. Therefore you have first to collect all the raw measurements and then import this data to a VNA Tools project.

We strongly advice to attend a VNA Tools training course if you want to learn more about these things and the project structure used by VNA Tools.

The attached presentation gives you some idea of the on wafer functionalities provided by VNA Tools. These slides are from the PlanarCal project meeting in Delft June 23, 2016.

Best Regards,

Juerg

[Stella Bevilacqua]

Hi Juerg,

thanks for your answer. 

Stella