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EPI2
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EE
2
11/9/07
Problem: Pressure setpoint deviation fault
Observed that system had a problem when going from a recipe step to another step with the same
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Problem: Pressure setpoint deviation fault
Observed that system had a problem when going from a recipe step to another step with the same
11/9/07
EE
2
11/6/07
Problem: Chamber A cannot backfill to 70 Torr
This alarm was caused by a dirty throttle. We removed the throttle valve and cleaned it by soaking it
unread,
Problem: Chamber A cannot backfill to 70 Torr
This alarm was caused by a dirty throttle. We removed the throttle valve and cleaned it by soaking it
11/6/07
EE
,
elm...@stanford.edu
2
10/20/07
Dopant 2 MFC resizing to 100 sccm maximum flow
Resizing the MFC will take about 2 weeks. I week to recalibrate the MFC and about 1 week to requalify
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Dopant 2 MFC resizing to 100 sccm maximum flow
Resizing the MFC will take about 2 weeks. I week to recalibrate the MFC and about 1 week to requalify
10/20/07
